Chapter 188 The extreme ultraviolet light source was successfully developed
At this time, it is already 10 o'clock in the morning.
Xu Li looked at the things on the test bench and finally breathed a sigh of relief.
"Finally made it!"
Then he slumped down on the chair, and his body and mind immediately relaxed.
After all, this rotator is not that easy to fix.
It is necessary to try different absorbing materials and compare with reference experiments, so that debris pollution can be dealt with to a greater extent.
After some screening, Xu Li, with the help of Xiao Hei, successfully came up with a synthetic material that achieved good debris absorption efficiency.
It is made into a suction rotor, which can absorb debris and further convert it into electrical energy.
The structure is extremely complex.
At this time, Xu Li heard the sound of footsteps moving behind him.
Li Mo's figure appeared next to him, and his eyes suddenly lit up when he saw the ring-shaped device on the test bench.
"Principal, has this rotator been built?"
"Well, it took a lot of my brain cells. Now let's take out the light source and have a look!"
Xu Li replied.
"Okay, I'll ask Professor Xu to come over."
Soon, Xu Hua came to the laboratory and personally tested the suction rotor made by Xu Li, and was full of praise for it.
"This is great. We can not use the two previous solutions and just install the suction rotor, so that the extreme ultraviolet light source can be produced!"
Xu Hua said happily.
"Aha~ You guys go ahead and take a rest first. I'll go next door to rest. I've been up all night. If you have any questions, call me!"
Xu Li yawned.
"Okay, principal, please take a rest first and leave the rest of the work to us."
"Well, okay."
Xu Li was really sleepy, so he left the laboratory and went to the lounge next door to rest. There were temporary beds there for scientific research staff who often stayed up late to study, and some necessary routine medicines were also prepared.
and a direct drinking water dispenser in case of emergencies.
Xu Li closed the door, closed his eyes, and fell into a dream.
In the dream, he was like a bystander, floating in the dream and seeing fragments of his wishes coming true:
The emergence of domestically produced extreme ultraviolet lithography machines shocked the world. The Suiren University that I founded has also officially entered the eyes of the country and the world. There is an endless stream of students, like a vast ocean, to accommodate these students who tirelessly pursue their ideals and wisdom.
....
Then there were blurry clips one after another. Because the speed was so fast, it was difficult to see clearly what was happening.
But in the end, he suddenly wandered around and came among the stars. Looking back, a galaxy appeared in front of his eyes.
That's the solar system, the star system where humans live.
At this time, a stream of light seemed to cut through the starry sky, go straight into the solar system, and disappear with a tail like a "comet".
"Principal! Principal!"
Suddenly, an excited and excited voice rang in his ears.
Xu Li broke away from the dream and when he opened his eyes, he saw Li Mo already standing in front of the bed.
Xu Li rubbed his groggy eyes and asked doubtfully: "What's wrong?"
"Success! Our extreme ultraviolet light source has been successfully developed!"
Li Mo looked excited.
Xu Lili felt sleepy and opened his eyes wide, "Really? Let's go and see together!"
He ignored Li Mo and left the lounge directly.
When he arrived at the laboratory, he found that many people were already surrounding a machine, and some were still holding notebooks or computers to record some data.
"Principal, you are here."
When Xu Hua saw Xu Li arriving, he waved to others to make way.
Xu Li walked over and took a look and found a box-shaped device lying quietly in the center of the test site.
"This is the extreme ultraviolet light source? Success?"
Xu Li said doubtfully.
"Yes, we have successfully developed this light source. After repeated experiments and comparative demonstrations, we have now completed the development of the process extreme ultraviolet lithography light source, plus I can independently design lenses, objectives and their optics.
The performance of the system is about 5 times higher than that of the current Chinese Hans Cat. If it can be matched with other lithography machine components, the assembled lithography machine can be comprehensively improved by about 35%, and can produce 5-nanometer chips with excellent performance.
....."
Professor Xu explained excitedly.
He has never been related to a core component of the crown of an industrial pearl, which was conquered by them.
As long as they are given time, Suiren Technology can join the world's top semiconductor players and become one of the manufacturers in the EUV lithography machine parts supply chain.
By then, we will be able to have our own voice in the semiconductor field. Even if we do not have a full set of photolithography machine manufacturing technology, at least we will not be so passive in China.
"In this case, we should also notify our allies. They must be waiting impatiently."
Xu Li smiled.
"Okay!"
Xu Hua responded.
Spring City, Chang Optoelectronics Institute
Director Chen is currently worrying about how to improve the photolithography machine.
Although we have already connected with Suiren Technology through Huawei's matchmaking before, the main purpose is to cooperate in transforming existing photolithography machines.
The modified lithography machine is mainly a 28nm lithography machine, because the current domestic lithography machine can only barely reach the 28nm process.
According to Modu Microelectronics, they are expected to deliver the first domestic 28nm process immersion lithography machine next year.
We have just reached the threshold of the high-end photolithography field, which means that the current domestic photolithography technology level is still at the mid-range level.
According to the process level of lithography machines, lithography machines are mainly divided into four levels: ultra-high-end, high-end, mid-range, and low-end.
First of all, the light source EUV13.5nm and the node 5n/7nm lithography machine are at the ultra-high-end level, and only one company in the world, AMSL, can assemble and manufacture them.
Secondly, the light source ArF is immersed, and the node is at the high-end level between 7 and 28nm.
Finally, the light source is ArF/KrF/I-Line, and the node is 65nm or 90nm, which are at the mid-range and low-end levels respectively.
Note that ArF/KrF here refers to the deep ultraviolet lithography light source.
If you want to make better chips, you must create better light sources, such as extreme ultraviolet light sources (EUV).
Even this ArF 28nm lithography machine is very different from AMSL's most advanced EUV5nm lithography machine process.
But it can also raise the domestic lithography level to the world's advanced level, which can fully meet the requirements of most logic chips such as common radio frequency chips, Bluetooth chips, power amplifier chips, and electrical driver chips, as well as the requirements of most digital chips. Director Chen also heard that Sansang is currently working on a lithography machine for 3nm chip technology. Many people may think it is very powerful, but people in the industry like him naturally know the details.
The current 7nm or 5nm chips are not what they used to be. The most accurate name is the name of the toothpaste factory, but it has also learned bad things.
The nanometer process of the chip is not really a few nanometers, but more of a newer and iterative statement.
The previous generation may be 4nm, and the next generation will be almost 3nm based on Moore's Law multiplied by square root 7.
In the past, the process referred to the width of the transistor, but now it refers to the channel width of the transistor, and this single-digit nanometer process has emerged.
Just like the 3nm lithography machine currently being researched by Sansan, because extreme ultraviolet lithography technology is affected by the photoelectric effect, its actual line accuracy may be more than ten nanometers or 20 nanometers.
However, this kind of nano-process chip cannot be made without EUV lithography machine.
Although the naming methods of each manufacturer are different, they are not completely meaningless.
Changguang Mechanical and Electrical Research Institute is also working hard on the next 14nm process lithography machine.
But without an extreme ultraviolet light source, it would be difficult to make such a lithography machine.
"Alas~"
Director Chen also knows that this will not take long, it may be several years, decades, or even the worst result - failure.
But we still have to continue to research and develop technology, otherwise we will have to be led by others in the future.
Just when Director Chen was filled with sorrow, a phone rang, interrupting his thoughts.
When he picked it up, his eyes were as wide as lanterns and he said in shock:
"What? Suiren Technology's extreme ultraviolet light source was successful?!"