After more than ten days of adjustments, this X-ray lithography machine finally approached the minimum accuracy of 2 nanometers. Although the wavelength used by the X-ray lithography machine is 8 nanometers, it is possible to achieve a 2-nanometer level grating through the convex lens focusing method.
In the assembly room of Shenguang Instruments, the X-ray lithography machine is quietly displayed like a container.
This is one of the most sophisticated devices in modern human technology, and it is thousands of times more difficult than carving patterns on hair.
However, this lithography machine is also a masterpiece that Think Society put all its efforts into. Huang Mingzhe spent nearly 1 billion from his private treasury to build this lithography machine.
Of course, it is not the lithography machine itself that costs one billion, but the supporting facilities, material research and development, and process experiments that are burning funds. Fortunately, material research and development has reduced the overall difficulty, otherwise there would be no hope of achieving results without 10 billion.
"President, 2 nanometers is already the current limit. Any smaller and quantum tunneling will occur," Gao Zhiyuan said.
Huang Mingzhe naturally knows the limits of silicon-based chips: "Thank you for your hard work. Let's talk about it Zhiyuan."
The two of them came to the office nearby.
“How much does a single photolithography machine cost?”
"A rough estimate of 200 million, including the sharing of R&D funds and supporting facilities, we must share the cost through mass production." Gao Zhiyuan replied.
The R&D of industrial products is like this. The production cost of the product will be very high at the beginning, but as the product is mass-produced and the production and R&D costs are continuously diluted, the overall cost will continue to decrease.
"Go all out to build another photolithography machine and keep the technology confidential," Huang Mingzhe ordered.
"No problem." Gao Zhiyuan nodded quickly.
The entire Shenguang Instruments gave up their Spring Festival vacation and went all out to improve the photolithography machine production line and adjust various process links.
at the same time.
Ministry of Industry and Information Technology.
Huang Anguo, the director in charge of the electronics industry, has the birth certificate application just sent by Shenguang Instruments on his desk.
Several other deputies also talked about this matter.
"Director, is this a lie?"
"Are they kidding themselves to achieve a 10-2nm level lithography machine?"
Huang Anguo knocked on the table: "Without an investigation, you have no right to speak. In addition, regarding the new battery of Thinking Battery, the above meaning is very clear, and it was passed without any problems."
Although the other deputies had different ideas, they knew they couldn't stand it when faced with this situation.
The founder of Thinking Society is Huang Mingzhe. As Huang Mingzhe's reputation has greatly increased in the mathematics and physics circles, he is now the chief engineer of the Hou Yi Project and can directly access the existence of Tianting.
His every move will attract attention from all parties. Those who want to pick peaches have not yet reached the Ziguang Pavilion with enough energy.
After passing the birth certificate of the Thinking Battery, Huang Anguo thought for a while and said: "Arrange an expert team, and I will lead the team to Lingnan the day after tomorrow."
If the impact of the thinking battery is not great, then the impact of the lithography machine will be different. If the lithography machine of Shenguang Instruments is true, it will definitely change an industry.
The chip manufacturing industry plays a very large role in modern society, involving almost every aspect, and is increasingly becoming an indispensable industry.
In China, there are currently only SMIC and TSMC in Taiyuan Province. TSMC has complex components and many uncontrollable factors. Currently, only SMIC can be used reluctantly.
The biggest shortcomings of the domestic chip manufacturing industry are photolithography machines and photoresists. Others can barely be dealt with, such as etching machines and ion implanters. There are no big problems. Even silicon wafers can be produced.
size.
Only photolithography machines and photoresist are tightly controlled by foreign countries. If it were more expensive, ASML would be willing to sell top-level photolithography machines, and the country would not feel like it is stuck in its throat.
It can only be said that the West is actually forcing China to do many things. It is not that China must develop these things, but that if it does not develop these things, it will be suppressed to death.
Faced with this situation, we can only do it head-on. There is no other choice.
As for raising your hands and surrendering.
Lucia used to think this way, thinking that after surrendering, the enemy would accept her, but she didn't expect that it would be wishful thinking in the end.
February 15th, the Spring Festival has just passed.
Huang Anguo brought the expert team to Shenguang Instrument Company.
"Chief Engineer Huang, I have long admired your name." Huang Anguo didn't show off enough.
"You're welcome." Huang Mingzhe said with a smile.
"Speaking of which, the Shanmei Huang family and the Jiangxia Huang family are both descended from the same origin. Chief Engineer Huang and I have been a family for five hundred years."
"All the people in the north and south of the Yangtze River are descendants of Yan and Huang." Huang Mingzhe replied as he walked.
"Yes, yes." Huang Anguo just wanted to build a relationship. This is very normal in China.
The security of Shenguang Instrument Company is much stricter than before, and five Chinese pastoral dogs are also equipped. After all, the photolithography machine technology is too sensitive.
In the empty top-grade dust-free assembly room, Gao Zhiyuan personally led hundreds of employees and dozens of researchers were busy.
In the test room on the side, the first X-ray lithography machine is being continuously tested and adjusted. After all, it is a first-generation product. There may not be many major problems, but minor problems are definitely inevitable.
Huang Mingzhe took Huang Anguo and a dozen experts, changed into special work clothes, and cleaned them through dust removal and static electricity removal before finally entering the test room.
As soon as the experts entered the testing room, they were attracted by the X-ray lithography machine on display.
"General Manager Huang, what is the standard for the X-ray radiation dose of the X-ray lithography machine?" one of the experts asked quickly.
This issue is very important. The penetrating power of X-rays is very strong. If the radiation dose exceeds the standard, the employees' health will inevitably suffer.
"This is a radiation dose detector. You can test it."
Several experts operate an ultra-high-precision environmental radiation detector.
[0.003602mSv]
"It's so small, only 0.003602 millisieverts."
"Test it in other locations as well."
In fact, it is because the photoresist of the X-ray lithography machine is very photosensitive, causing the power of the X-ray laser to be very small.
In addition, when developing photoresist, the Materials Research Institute produced some by-products, including materials that can absorb X-rays.
Shenguang Instruments paid great attention to the issue of X-ray radiation from the beginning of its design. They used this material to create some removable radiation-absorbing partitions.
These partitions can absorb most of the scattered X-rays, thereby reducing the radiation dose of X-rays to the surrounding environment.
Although doing this requires replacing the partitions every once in a while, at least employees will not be exposed to excessive radiation.
In fact, the current radiation dose is much smaller than that of hospital X-rays (0.1mSv) and CT (2-15mSv), which is similar to the radiation dose we receive daily when watching TV.
In addition, the protective clothing of the staff is also a product modified by Shenguang Instruments itself, which can further block X-rays, so the environmental radiation here is not much different from the outside environment.
"Overall, it is in line with expectations, and the environmental radiation dose is between 0.0032 and 0.0047 millisieverts."
The official responsible for recording quickly recorded the data on the form.
The next step was the highlight. These experts borrowed equipment from Shenguang Instruments to test the accuracy of the lithography machine and other parameters.
They carried out this work alone for more than a week, mainly to ensure that nothing went wrong, lest it become an international joke.